Electron Microprobe Analysis

Photo of an electron microprobe.

The Electron Microprobe at MIT. (Image by Dr. Nilanjan Chatterjee.)

Instructor(s)

MIT Course Number

12.141

As Taught In

January IAP 2012

Level

Undergraduate

Cite This Course

Course Description

Course Features

Course Highlights

This lab-oriented course introduces the student to the subject of X-ray spectrometry and micrometer-scale chemical quantitative analysis of solid samples through an intensive series of hands-on laboratory exercises that use the electron microprobe.

Course Description

The electron microprobe provides a complete micrometer-scale quantitative chemical analysis of inorganic solids. The method is nondestructive and utilizes characteristic X-rays excited by an electron beam incident on a flat surface of the sample. This course provides an introduction to the theory of X-ray microanalysis through wavelength and energy dispersive spectrometry (WDS and EDS), ZAF matrix correction procedures and scanning electron imaging with back-scattered electron (BSE), secondary electron (SE), X-ray using WDS or EDS (elemental mapping), and cathodoluminescence (CL). Lab sessions involve hands-on use of the JEOL JXA-8200 Superprobe.

Other Versions

Related Content

Nilanjan Chatterjee. 12.141 Electron Microprobe Analysis. January IAP 2012. Massachusetts Institute of Technology: MIT OpenCourseWare, https://ocw.mit.edu. License: Creative Commons BY-NC-SA.


For more information about using these materials and the Creative Commons license, see our Terms of Use.


Close